PTlogo.gif (1.8kB) FT 1030
Deep-Level Transient Spectroscopy System

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Operating Modes

  • C-DLTS
  • CC-DLTS
  • I-DLTS
  • DD-DLTS
  • Zerbst-DLTS
  • O-DLTS
  • FET-Analysis
  • MOS-Analysis
  • ITS (Isothermal Transient Spectroscopy)
  • Trap profiling
  • Capture Cross Section measurement
  • I/V,I/V(T) Richardson plot
  • C/V, C/V(T)
  • TSCAP
  • PITS (Photon Induced Transient Spectroscopy)
  • DLOS (Special system)

Load PDF-file for program structure and some key features.


Principles Software Hardware Specifications

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