Since developed in the early 80th the Deep-Level Transient Spectroscopy has grown up to a most powerful tool for semiconductor characterization with unbeaten sensitivity in trap concentration detection and high efficiancy in impurity parameter determination.

Handling difficulties of the analog DLTS systems could drastically be reduced by a digital system with powerful software enhancing flexibility and user friendliness.

This DLTS system developed by PhysTech with close cooperation to the University of Kassel has been licenced to BIO-RAD Micromeasurement Ltd. and became as BIO-RAD´s DL 8000 DLTS the standard in word wide installed DLTS systems.

• Automatic contact check
• Routine measurements and enhanced software
• Automatic capacitance compensation
• Three terminal FET current transient measurement
• Large capacitance and concentration range
• Flexible, modular hardware
• Support of various cryostats and temperature controllers
• Fourier transform (F-DLTS), rate windows and user defined correlation functions
• DLTFS (Deep-Level Transient Fourier Spectroscopy) evaluation

• Constant Capacitance
• Optical Excitation
• Fast Pulse Interface
• ±100 V Option
• Multi Sample Interface
• New HERA-DLTS (High Energy Resolution Analysis) by Laplace and deconvolution

• C-DLTS
• CC-DLTS
• I-DLTS
• DD-DLTS
• Zerbst-DLTS
• O-DLTS
• FET-Analysis
• MOS-Analysis
• ITS (Isothermal Transient Spectroscopy)
• Trap profiling
• Capture Cross Section measurement
• I/V,I/V(T) Richardson plot
• C/V, C/V(T)
• TSC/TSCAP
• PITS (Photon Induced Transient Spectroscopy)
• DLOS (Special system)